2018

    2017

    1. In-line metrology of nanoscale features in semiconductor manufacturing systems Yao, T.-F., Duenner, A., and Cullinan, M. Precision Engineering 2017 [Abs]

    2016

    1. A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications Duenner, Andrew, Yao, Tsung-Fu, De Hoyos, Bruno, Gonzales, Marianna, Riojas, Nathan, and Cullinan, Michael Journal of Micro and Nano-Manufacturing 2016 [Abs]
    2. In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism Yao, Tsung-Fu, Duenner, Andrew, and Cullinan, Michael Journal of Micro and Nano-Manufacturing 2016 [Abs]
    3. Low-cost automated wafer handling system for high throughput wafer metrology Duenner, A.C., DeHoyos, B., Gonzales, M., Riojas, N., and Cullinan, M. In Proceedings - ASPE 2016 Annual Meeting 2016 [Abs]
    4. In-line dimensional metrology for nanomanufacturing systems Yao, T.-F., Duenner, A., and Cullinan, M. In ASME 2016 11th International Manufacturing Science and Engineering Conference, MSEC 2016 2016 [Abs]
    5. Quick approach mechanism for tip-based in-line nanometrology systems Yao, T.-F., Duenner, A., and Cullinan, M. In Proceedings - ASPE 2016 Annual Meeting 2016 [Abs]

    2015

    1. In-line, wafer-scale inspection in nano-fabrication systems Yao, T.-F., Duenner, A., and Cullinan, M.A. In Proceedings - ASPE 2015 Annual Meeting 2015 [Abs]
    2. Carbon nanotube growth force detection on multi-axis MEMS sensor with integrated microheater Ladner, I.S., Duenner, A., and Cullinan, M.A. In Proceedings - ASPE 2015 Annual Meeting 2015 [Abs]